Manager Business Development
Microsystems
Microsystems
Pioneering the Next Generation of MEMS & MEMS Devices
The Microsystems Research Division aims to develop beyond state-of-the-art technologies for novel micro-electromechanical systems (MEMS) and MEMS devices. In close collaboration with industrial and scientific partners, we drive transformative solutions through interdisciplinary research, connecting the dots from innovation, proof-of-concept to product prototypes.
Our research encompasses:
- Design, modeling and simulation of MEMS and MEMS devices
- Conception and prototyping of microsystems
- Characterization and testing of materials, sensors and actuators
Our research areas
Thin Film Technologies
Deposition of high-quality thin films—including piezoelectric, dielectric, and metallic materials—paired with the development of innovative films, advanced characterization techniques, and real-world application testing in device structures.
Piezoelectric Microsystem Technologies
End-to-end development of next-generation piezo-based MEMS sensors and actuators — including RF-MEMS, PMUTs, micro mirror and acoustic MEMS — from concept to reality. We integrate finite element modeling, precision design, microfabrication, and rigorous testing to deliver cutting-edge solutions.
Integrated Photonics Technologies
Full development from concept to prototyping of on-chip photonics-based sensors using innovative integrated photonics, meta-optics and integrated opto-microfluidics technologies. We tackle applications in remote sensing (LiDAR), 3D imaging, environmental monitoring, telecommunications and more.
Magnetic Microsystem Technologies
Development of next-generation magnetic microsystems, sensors and magnetic position and orientation systems. We specialize in designing, fabricating and testing advanced magnetic sensors and devices—such as AMR sensors and MEMS-integrated solutions—while driving innovation through prototyping and computational modeling.
Infrastructure
To enable beyond state-of-the-art research, it is essential to have a supporting infrastructure that fosters innovation and collaboration. Equipped with high-level equipment, our SAL MicroFab and labs provide our experts with the tools they need to push the boundaries of research forward.
SAL MicroFab
- 1400 m² in total
- To bridge the gap between R&D and high-volume manufacturing with advanced prototyping, small series production and process transfer to industrial level.
Magnetics Lab
- Characterization of the magnetic properties of soft and hard magnetic materials and 3D magnetic field mapping.
- Equipment for magnetic field generation (up to 3.5 T), sensor calibration, and background field cancellation.
- Characterization of high-precision magnetic encoders as well as magnetic position and orientation systems using custom-designed test platforms.
Photonics Lab
- Comprehensive characterization and testing capabilities for optical MEMS, photonic integrated circuits (PICs), meta-optics and photonic sensors.
- Cutting-edge 3D Photonic Assembly and integration of photonics components.
- Advanced infrastructure, including automated photonic probes and an environmental control system for testing next-gen PICs.
Thin Film Lab
- Characterization of the ferro/piezoelectric and dielectric properties of both oxide and nitride piezoelectric thin films.
- Application-tailored wafer-level characterization, including defects, failure and reliability analysis.
- State-of-the-art characterization equipment for evaluation of materials and devices performance in real-world conditions.
Acoustics Lab
- State-of-the-art equipment for comprehensive testing: Evaluation of performance and reliability at the material, device, and system levels.
- Diverse applications: supports research and development in sensors, actuators, RF filters, microphones, and ultrasonic transducers.
Micro Optics Lab
- Micro-optics component and optical MEMS characterization.
- Optical function, wavefront characterization.
- Bolometer and other sensors characterization.
- Responsivity, low frequency noise figures (1/f).
- Gas sensors testbench.
Projects & Success Stories
Our success stories are proof to the dedication, innovation, and collaboration that drive us forward. From groundbreaking discoveries to many real-world applications, each achievement reflects our commitment to advancing knowledge and supporting our partners to be one step ahead. Explore the latest projects & success stories that have shaped different industries and pioneered transformative innovations.
Contact
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